Patent holdings for IPC class H01J 37/18

Total number of patents in this class: 443

10-year publication summary

56
47
43
41
35
30
37
34
28
7
2015 2016 2017 2018 2019 2020 2021 2022 2023 2024

Principal owners for this class

Owner
All patents
This class
Hitachi High-Tech Corporation
4424
65
Hitachi High-Technologies Corporation
2034
63
FEI Company
851
29
ASML Netherlands B.V.
6816
27
Axcelis Technologies, Inc.
429
15
JEOL Ltd.
556
14
V Technology Co., Ltd.
394
12
Nikon Corporation
7162
11
Carl Zeiss Microscopy GmbH
1146
9
Carl Zeiss Microscopy, LLC
30
7
Hitachi High-Tech Science Corporation
326
6
Tokyo Electron Limited
11599
6
Applied Materials, Inc.
16587
5
Applied Materials Israel, Ltd.
549
5
Canon Anelva Corporation
676
5
Intevac, Inc.
127
5
Mapper Lithography IP B.V.
136
5
Protochips, Inc.
71
5
bioMerieux, Inc.
391
4
Hermes Microvision, Inc.
25
4
Other owners 141